Film Thickness Measureme
Photoresist Thickness Measurement Tools for Optical Constants of Dielectric and Semiconductor Thin Films
Film Thickness Measurement
Photoresist – To measure the materials thickness of thin films by using Photoresist Technology.
- Thickness Measurement Range: 15nm-70µm
- Wavelength Range: 380 to 1050 nm
- Minimum Thickness to Measure: 50 nm
- Accuracy: The Greater of 2nm or 0.2%
- Precision: 0.02 nm
- Repeatability: 0.1nm
- Stability: 0.05 µm
