Global Loop Slurry and Chemical supply System with mixing and blending Features
Customized Automation Design for Semiconductor Industrial CDM (Chemical Dispense Module) – GLOBAL LOOP
- supports from 200L up to 1000L mixing capacity with user desired Chemical, Slurry, H2O2 ratio
- Control with HMI and PLC controller for Selection of the ratio of DI water, Chemical, Slurry and H2O2
- Air valves in VMB Box to top-up the chemical with Flexi I/O system
- Level sensor with warning buzzer
- Weight machine (Load Cell) for programmable small batch size flexibility
- Leakage sensors
- PH meter Concentration meter (Optional)
- Exhaust hole
- Chemical, Slurry and DI water Leak Sensor
- Primary Pump (Top up Pump), Secondary Pump (Loop pump)
- Data logs and pressure for Loop status
