Local Loop Slurry and Chemical supply System with mixing and blending System
Customized Automation Design for Semiconductor Industrial CDM (Chemical Dispense Module) – LOCAL LOOP
- Highly reliable mixing program algorithm
- Control with HMI and PLC controller for Selection of the ratio DI water, Chemical, Slurry and H2O2
- Buzzer sound for low level warning
- Highly reliable Weight machine (Load Cell) for programmable small batch size flexibility
- Level sensors, Leakage sensors
- Exhaust hole
- Chemical, Slurry and DI water Leak Sensor
- Tool stopped when EMO triggered
- Movable for easy relocating
- Suitable for Qualification of chemical and Slurry
Raw Chemical Supply Cabinet
Raw Chemical Supply Cabinet
70L Mixing and Blending Tank, 5L Test Ph Tank and 70L Tank
70L Mixing and Blending Tank, 5L Test Ph Tank and 70L Tank
Mixing Cabinet
Mixing Cabinet PLC
TIW Dosing
TIW Dosing Etching Flow Diagram